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Technology | 2009.12.08

Rudolph Announces Multiple Orders for Explorer Inspection Cluster from Taiwan Foundry

FLANDERS, N.J.--(BUSINESS WIRE)--Rudolph Technologies, Inc. (NASDAQ: RTEC), a worldwide leader in process characterization solutions for the semiconductor manufacturing industry, announced today the receipt of multiple orders for its latest Explorer® Inspection Cluster from a major Taiwanese foundry. The orders include new systems as well as upgrades for previously installed equipment. The Explorer Cluster monitors defectivity in the Chemical Mechanical Polish (CMP) process module. The Expl

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