Technology | 2009.10.07
FSI International Receives Follow-on Order for FSI ORION® Single Wafer Cleaning Technology from Major U.S. Based Semiconductor Manufacturer
MINNEAPOLIS--(BUSINESS WIRE)--FSI International, Inc. (Nasdaq: FSII) a leading supplier of wafer processing, cleaning and surface conditioning equipment for semiconductor manufacturing, announced today the receipt of a repeat order for the FSI ORION® single wafer cleaning technology from a major U.S. based semiconductor manufacturer. The eight process chamber FSI ORION system will be integrated into the fabrication of 32nm BEOL copper/low-k interconnects and for 22nm development activities.
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