Industry | 2012.12.06
SUSS MicroTec Japan Seminar in Tokyo addressed critical challenges for 3D Integration and Next Generation Lithography
GARCHING, Germany--(BUSINESS WIRE)--SUSS MicroTec, a global supplier of equipment and process solutions for the semiconductor industry and related markets, hosted the SUSS MicroTec Japan Seminar 2012 on December 4, at the Hyatt Regency Tokyo. In two parallel tracks the latest developments in 3D Integration and Next Generation Lithography as 193i, EUVL and NIL were presented and discussed. Both seminars attracted approximately 200 attendees. The very well attended seminar on 3D Integration addres
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